PUBLICATIONS
2022
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Gann, K., Chang, C.S., Chang, M.C., Sutherland, D.R., Connolly, A.B., Muller, D.A., van Dover, R.B., Thompson, M.O. "Initial nucleation of metastable γ-Ga2O3 during sub-millisecond thermal anneals of amorphous Ga2O3", Applied Physics Letters, 10.1063/5.0087093 (2022).
2021
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Ament, S., Amsler, M., Sutherland, D.R., Chang, M.C., Guevarra, D., Connolly, A.B., Gregoire, J.M., Thompson, M.O., Gomes, C.P, van Dover, R.B. "Autonomous materials synthesis via hierarchical active learning of nonequilibrium phase diagrams", Science Advances, 10.1126/sciadv.abg4930 (2021).
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Ament, S., Amsler, M., Sutherland, D.R., Chang, M.C., Guevarra, D., Connolly, A.B., Gregoire, J.M., Thompson, M.O., Gomes, C.P, van Dover, R.B. "Autonomous synthesis of metastable materials", ArXiv, 2101.07385 (2021).
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Bell, R.T., Beaucage, P.A., Murphy, M.J., Connolly, A.B., Wiesner, U., Ginley, D., van Dover, R.B., Thompson, M.O. "Rapid Identification of Synthetic Routes to Functional Metastable Phases Using X-ray Probed Laser Anneal Mapping (XPLAM) Time–Temperature Quench Maps", ACS Chem. Mater., 10.1021/acs.chemmater.0c04926 (2021)
2020
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Sutherland, D.R., Connolly, A.B., Amsler, M., Chang, M.C., Gann, K.R., Gupta, V., Ament, S., Guevarra, D., Gregoire, J.M., Gomes, C.P, van Dover, R.B., Thompson, M.O. "Optical Identification of Materials Transformations in Oxide Thin Films", ACS Combi Sci, 10.1021/acscombisci.0c00172 (2020).
2019
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Sun. Z., Liepe, M., Oseroff, T.E., Porter, R.D., Arias, T., Connolly, A.B., Sholtz, J.M., Sitaraman, N., Thompson, M.O., Deng, X., Dobson, K.D. "Electroplating of Sn Film on Nb Substrate for Generating Nb₃Sn Thin Films and Post Laser Annealing". Joint Accelerator Conferences Website, 10.1016/j.matlet.2021.129557 (2019).
2016
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A.G. Jacobs, C. Liedel, H. Peng, L. Wang, D.-M. Smilgies, C.K. Ober, and M.O. Thompson, "Kinetics of block copolymer phase segregation during sub-millisecond transient thermal annealing," Macromolecules, 0.1021/acs.macromol.6b00698 (2016).
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R.T. Bell, A.G. Jacobs, V.C. Sorg, B. Jung, M.O. Hill, B.E. Treml, and M.O. Thompson, "Lateral temperature-gradient method for high-throughput characterization of material processing by millisecond laser annealing," ACS Comb. Sci., 10.1021/acscombsci.6b00043 (2016).
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C.R. Schmidtlein, J.N. Turner, M.O. Thompson, K.C. Mandal, I. Häggström, J. Zhang, J.L. Humm, D.H. Feiglin, and A. Krol, "Performance modeling of a wearable brain PET (BET) camera," Proc. SPIE, 9788, 978806 (2016).
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B. Zhu, K.E. Roach, D.M. Lynch, C.Y. Chung, D.G. Ast, R.G. Greene, and M.O. Thompson, "Effects of RF sputtering parameters on c-axis aligned crystalline (CAAC) InGaZnO4 films using design of experiment (DOE) approach," ECS J. Solid State Sci. Technol. 5(6), P368-P375 (2016).
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A.G. Lind, T.P. Martin, Jr., V.C. Sorg, E.L. Kennon, V.Q. Truong, H.L. Aldridge, C. Hatem, M.O. Thompson, and K.S. Jones, "Activation of Si implants into InAs characterized by Raman scattering," J. Appl Phys. 119(9), 095705 (2016).
2015
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C.-W. Lee, B. Lukose, M.O. Thompson, and P. Clancy, "Energetics of neutral Si dopants in InGaAs: an ab initio and semiemperical Tersoff model study," Phys. Rev. B. 91, 094108 (2015).
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A.G. Jacobs, C. Liedel, C.K. Ober, and M.O. Thompson, "Understanding of PS-b-PMMA phase segregation under laser-induced millisecond thermal annealing," Proc. SPIE 9423 942309 (2015).
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J. Jiang, A. Jacobs, M.O. Thompson, and C.K. Ober, "Laser spike annealing of DSA photoresists," J. Photopolym. Sci. Technol. 28(5), 631-634 (2015).
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V. Sorg, S.N. Zhang, M. Hill, P. Clancy, and M.O. Thompson, "(Invited) Dopant activation and deactivation in InGaAs during sub-millisecond thermal annealing," ECS Trans. 66(4), 117-124 (2015).
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C.Y. Chung, B. Zhu, R.G. Greene, M.O. Thompson, and D.G. Ast, "High mobility, dual layer, c-axis aligned crystalline/amorphous IGZO thin film transistor," Appl. Phys. Lett. 107, 183503 (2015).
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D.M. Lynch, B. Zhu, B.D.A. Levin, D.A. Muller, D.G. Ast, R.G. Greene, and M.O. Thompson, "Deposition conditions and HRTEM characterization of CAAC IGZO," SID Symp. Dig. Tech. 46(1), 308-311 (2015).
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B. Zhu, D.M. Lynch, C.Y. Chung, D.G. Ast, R.G. Greene, and M.O. Thompson, "Effects of RF sputtering parameters and film composition on c-axis aligned crystalline (CAAC) IGZO films," SID Symp. Dig. Tech. 46(1) 667-680 (2015).
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B.E. Treml, A.B. Robbins, K. Whitham, D.-M. Smilgies, M.O. Thompson, and T. Hanrath, "Processing-structure-property relationships in laser-annealed PbSe nanocrystal thin films," ACS Nano 9(4), 4096-4102 (2015).
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B. Zhu, D.M. Lynch, C.Y. Chung, D.G. Ast, R.G. Greene, and M.O. Thompson, "Chemical etch rate and X-ray structure of reactive sputtered c-axis aligned crystalline InxGayZnzO4 films," ECS J. Solid State Sci. Technol. 4(5), Q43 (2015).
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B.E. Treml, A.G. Jacobs, R.T. Bell, M.O. Thompson, and T. Hanrath, "μRainbow: CdSe nanocrystal photoluminescence gradients via laser spike annealing for kinetic investigations and tunable device design," Nano Lett. 16(2), 967-972 (2015).
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K.W. Tan, B. Jung, J.G. Werner, E.R. Rhoades, M.O. Thompson, and U. Wiesner, "Transient laser heating induced hierarchical porous structures from block copolymer-direct self-assembly," Science 349(6243), 54 (2015).
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A.G. Jacobs, B. Jung, J. Jing, C.K. Ober, and M.O. Thompson, "Control of polystyrene-block-poly(methyl methacrylate) directed self-assembly by laser-induced millisecond thermal annealing," J. Micro/Nanolith. MEMS MOEMS. 14(3), 031205 (2015).
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C.Y. Chung, B. Zhu, D.G. Ast, R.G. Greene, and M.O. Thompson, "High mobility amorphous InGaZnO4thin film transistors formed by CO2 laser spike annealing," Appl. Phys. Lett. 106 124506 (2015).
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A.M. Raymunt, R.T. Bell, M.O. Thompson, and P. Clancy, "The effect of laser annealing on the structure of amorphous porous SiCOH materials," J. Phys. Chem. C 119(22), 12616-12624 (2015).
2014
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D.M. Lynch, B. Zhu, B.D.A. Levin, D.A. Muller, D.G. Ast, R.G. Greene, and M.O. Thompson, "Characterization of reactively sputtered c-axis aligned nanocrystalline InGaZnO4," Appl. Phys. Lett. 105, 262103 (2014).
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A.G. Jacobs, B. Jung, C.K. Ober, and M.O. Thompson, "Control of PS-b-PMMA directed self-assembly registration by laser induced millisecond thermal annealing," Proc. SPIE 9049, 90492B (2014).
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B. Jung, P. Satish, D.N. Bunck, W.R. Dichtel, C.K. Ober, and M.O. Thompson, "Laser-induced sub-millisecond heating reveals distinct tertiary ester cleavage reaction pathways in a photolithographic resist polymer," ACS Nano, 8(6), 5746-5756 (2014).
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J. Jiang, M.O. Thompson, and C.K. Ober, "Line width roughness reduction by rational design of photoacid generator for sub-millisecond laser post-exposure bake," Proc. SPIE 9051, 90510H (2014).
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B. Jung, C.K. Ober, and M.O. Thompson, "Controlled roughness reduction of patterned resist polymers using laser-induced sub-millisecond heating," J. Mater. Chem. C 2, 9115-9121 (2014).
2013
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Y.H.D. Lee, M.O. Thompson, and M. Lipson, "Deposited low temperature silicon GHz modulator," Optics Express 21(22), 26688-26692 (2013).
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J. Jiang, B. Jung, M.O. Thompson, and C.K. Ober, "Line edge roughness of high deprotection activation energy photoresist by using sub-millisecond post exposure bake," Proc. SPIE 8682, 86821N (2013).
2012
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K. Iyengar, B. Jung, M. Willemann, P. Clancy, and M.O. Thompson, "Experimental determination of thermal profiles during laser spike annealing with quantitative comparison to 3-dimensional simulations," Appl. Phys. Lett. 100, 211915 (2012).
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B. Jung, J. Sha, F. Paredes, M. Chandhok, T.R. Youngkin, U. Wiesner, C.K. Ober, and M.O. Thompson, "Kinetic rates of thermal transformations and diffusion in polymer systems measured during sub-millisecond laser-induced heating," ACS Nano 6(7), 5830-5836 (2012).
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M. Krysak, B. Jung, M.O. Thompson, and C.K. Ober, "Investigation of acid diffusion during laser spike annealing with systematically designed photoacid generators," Proc. SPIE 8325, 83250M (2012).
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B. Jung, C.K. Ober, and M.O. Thompson, "Deprotection reaction kinetics in chemically amplified photoresists determined by sub-millisecond post exposure bake," Proc. SPIE 8325, 83250N (2012).
2011
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B. Jung, C.K. Ober, M.O. Thompson, and M. Chandhok, "LWR reduction and flow of chemically amplified resist patterns during sub-millisecond heating," Proc. SPIE 7972, 79722S (2011).
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W.J. Baumgardner, J.J. Choi, K. Bian, L.F. Kourkoutis, D.-M. Smilgies, M.O. Thompson, and T. Hanrath, "Pulsed laser annealing of thin films of self-assembled nanocrystals," ACS Nano, 5(9), 7010-7019 (2011).
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K.W. Tan, S.A. Saba, H. Arora, M.O. Thompson, and U. Wiesner, "Colloidal self-assembly-directed laser-induced non-close-packed crystalline silicon nanostructures," ACS Nano 5(10), 7960-7966 (2011).
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B. Jung, C.K. Ober, M.O. Thompson, T.R. Younkin, and M. Chandhok, "Addressing challenges in lithography using sub-millisecond post exposure bake of chemically amplified resists," Proc. SPIE7972, 797219 (2011).
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B. Jung, M. Chandhok, T.R. Younkin, C.K. Ober, and M.O. Thompson, "Time dependent behavior of chemically amplified resist characterized under sub-millisecond post exposure bake," J. Photopolym. Sci. Technol. 24(5), 487-490 (2011).
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M.H. Willemann and M.O. Thompson, "Two-stage laser thermal processing of nanoparticle inks on flexible substrates for high performance electronics," Mater. Res. Soc. Symp. Proc. 1340 (2011).
2010
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H. Arora, P. Du, K.W. Tan, J.K. Hyun, J. Grazul, H.L. Xin, D.A. Muller, M.O. Thompson, and U. Wiesner, "Block copolymer self-assembly-directed single-crystal homo- and heteroepitaxial nanotructures," Science 330(6001), 214-219 (2010).
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B. Jung, J. Sha, F. Paredes, C.K. Ober, M.O. Thompson, M. Chandhok, and T.R. Younkin, "Sub-millisecond post exposure bake of chemically amplified resists by CO2 laser heat treatment," Proc. SPIE 7639, 76390L (2010).
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C. Lew and M.O. Thompson, "Quantifying electronic charge trap states and the effect of imprint on ferroelectric poly(vinylidene fluoride-trifluoroethylene) thin films," J. Appl. Phys. 107, 104110 (2010).
2009
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J. Sha, B. Jung, M.O. Thompson, C.K. Ober, M. Chandhok, and T.R. Younkin, "Submillisecond post-exposure bake of chemically amplified resists by CO2 laser spike annealing," J. Vac. Sci. Technol. B27, 3020 (2009).
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C. Lew and M.O. Thompson, "Characterizing trapped charge dynamics in imprinted poly(vinylidene fluoride-trifluoroethylene) ferroelectric thin films using the fast ramp thermally stimulated current technique," J. Appl. Phys. 105, 054112 (2009).
2008
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C. Lew and M.O. Thompson, "A fast ramp rate thermally stimulated current technique to quantify electronic charge dynamics in thin films," Rev. Sci. Instrum. 79, 043906 (2008).
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J.E. Goose, K. Wong, P. Clancy, and M.O. Thompson, "Direct melt processing of pentacene at temperatures above 1000°C by pulsed laser irradiation," Appl. Phys. Lett. 93, 183306 (2008).
2006
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E.D. Tsagarkis, C. Lew, M.O. Thompson, and E.P. Giannelis, "Nanocrystalline barium titanate films on flexible plastic substrates via pulsed laser annealing," Appl. Phys. Lett.89, 202910 (2006).
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E.J. Albenze, M.O. Thompson, and P. Clancy, "Molecular dynamics study of explosive crystallization of SiGe and boron-doped SiGe alloys," Ind. Eng. Chem. Res. 45(16), 5628-5639 (2006).
2004
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W. Chung, M.O. Thompson, P. Wickboldt, D. Toet, and P.G. Carey, "Room temperature indium tin oxide by XeCl excimer laser annealing for flexible display," Thin Solid Films 460(1-2), 291-294 (2004).
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E.J. Albenze, M.O. Thompson, and P. Clancy, "Atomistic computer simulation of explosive crystallization in pure silicon and germanium," Phys. Rev. B 70, 094110 (2004).
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C. Lew and M.O. Thompson, "Quantifying the role of electronic charge trap states on imprint behavior in ferroelectric poly(vinylidene fluoride-trifluoroethylene) (P(VDF-TrFE)) thin films," Mater. Res. Soc. Symp. Proc. 830, (2004).
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Y.F. Chong, H.-J.L. Grossman, K.L. Pey, M.O. Thompson, A.T.S. Wee, and C.H. Tung, "Reduction of polysilicon gate depletion effect in NMOS devices using laser thermal processing," Electrochem. Solid-State Lett. 7(2), G25-G27 (2004).
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Y.F. Chong, H.-J.L. Grossman, M.O. Thompson, S. Yang, K.L. Pey, and A.T.S. Wee, "Time-resolved reflectance studies of silicon during laser thermal processing of amorphous silicon gates on ultrathin gate oxides," J. Appl. Phys. 95, 6048 (2004).
2003
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W. Chung, P. WIckboldt, D. Toet, P.G. Carey, and M.O. Thompson, "Laser-crystallized high quality ITO on plastic substrates for flexible displays," Mater. Res. Soc. Symp. Proc. 769, (2003).
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Y.F. Chong, H.-J.L. Grossman, M.O. Thompson, K.L. Pey, A.T.S. Wee, S. Talwar, and L. Chan, "Reduction of carrier depletion in p+ polysilicon gates using laser thermal processing," IEEE Electron. Dev. Lett. 24(5), 360-362 (2003).
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R.N. Das, C. Lew, I. Zergioti, M.O. Thompson, and E.P. Giannelis, "Combinatorial laser processing of dielectric/ferroelectric thin and thick films," Mater. Res. Soc. Symp. Proc. 748, (2003).
2002
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L. Wang, P. Clancy, M.O. Thompson, and C.S. Murthy, "Thermodynamic and kinetic studies of laser processing of heavily boron-doped amorphous silicon using molecular dynamics," J. Appl. Phys. 92, 2412 (2002).
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K.K. Dezfulian, J.P. Krusius, M.O. Thompson, and S. Talwar, "Laser-induced lateral epitaxy in fully depleted silicon-on-insulator junctions," Appl. Phys. Lett. 81, 2238 (2002).
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W. Chung, M.O. Thompson, P. Wickboldt, D. Toet, and P.G. Carey, "Crystallization of ultra-low temperature ITO by XeCl excimer laser annealing," SID Symp. Dig. Tech. 33(1), 57-59 (2002).
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T.J. Renk, P.P. Provencio, P.G. Clem, S.V. Prasad, and M.O. Thompson, "Use of intense ion beams for surface modification and creation of new materials," Sandia Technical Report SAND2002-4215 (2002).
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Y.F. Chong, K.L. Pey, A.T.S. Wee, M.O. Thompson, C.H. Tung, and A. See, "Laser-induced amorphization of silicon during pulsed-laser irradiation of TiN/Ti/polycrystalline silicon/SiO2/silicon," Appl. Phys. Lett. 81, 3786 (2002).
2001
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W. Luo, S. Yang, P. Clancy, and M.O. Thompson, "Deactivation kinetics of supersaturated boron:silicon alloys," J. Appl. Phys. 90, 2262 (2001).
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L. Tian, M.O. Thompson, R. Dieckmann, C.-Y. Hui, and Y.-Y. Lin, "Bulk diffusion measurements to study the effectiveness of barrier layers: I. Mathematical treatment," J. Appl. Phys. 90, 3799 (2001).
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S. Yang and M.O. Thompson, "Laser thermal induced crystallization for 20 nm device structures," Mater. Res. Soc. Symp. Proc. 669, (2001).
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W. Chung and M.O. Thompson, "Effect of excimer laser annealing on ultra-low temperature gate dielectrics," Mater. Res. Soc. Symp. Proc. 685, (2001).
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C. Lew and M.O. Thompson, "Silicide formation by pulsed excimer laser annealing," Mater. Res. Soc. Symp. Proc. 685, (2001).
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P.G. Sanders, M.O. Thompson, T.J. Renk, and M.J. Aziz, "Liquid titanium solute diffusion measured by pulsed ion-beam melting," Metall. Mater. Trans. A 32(12), 2969-2974 (2001).
2000
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A. Chojnacka and M.O. Thompson, "Morphological instabilities during explosive crystallization of germanium films," Mater. Res. Soc. Symp. Proc. 648, (2000).
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D. Toet, P.M. Smith, T.W. Sigmon, and M.O. Thompson, "Spatially selective materials deposition by hydrogen-assisted laser-induced transfer," Appl. Phys. Lett. 77, 307 (2000).
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J.A. Kittl, P.G. Sanders, M.J. Aziz, D.P. Brunco, and M.O. Thompson, "Complete experimental test of kinetic models for rapid alloy solidification," Acta Mater. 48(20), 4797-4811 (2000).